Theoretical analysis shows that the minimum measuring diameter can reach 0.19 μm, and the root mean square of the residuals is only 1.4 nm. Combining confocal microscopy with super-resolution image restoration significantly improves the lateral resolution of the NTEM image, yields a reasonable circle edge-setting criterion of 0.2408, and achieves precise pore edge detection. This method facilitates the online inspection of the pore size evolution during etching. (E.G.) pt.Liu, Dali Wang, Yun Qiu, Lirong Mao, Xinyue Zhao, WeiqianA confocal pore size measurement based on super-resolution image restoration is proposed to obtain a fast and accurate measurement for submicrometer pore size of nuclear track-etched membranes (NTEMs). The Nichols model was used in the determination of the constitutive equation of the porous migration velocity.
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March 2023
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